Overview
This novel and smart analysis tool overcomes the barriers of standard XPS systems by enabling analyses at pressures far above UHV. EnviroESCA is designed for high-throughput analysis and opens up new applications in the fields of medical technology, biotechnology and the life sciences. It offers the shortest loading-to-measurement time on samples of all types including liquids, tissue, plastics and foils, powders, soil, zeolites, rocks, minerals and ceramics.
EnviroESCA
| Electron Spectrometer | Hemispherical electron analyzer with 150 mm mean radius Differentially pumped lens system Delayline detector with up to 400 channels |
| X-ray Source | Al Kα micro-focused monochromator Rowland circle diameter of 600 mm Spot sizes of 200 μm – 1 mm optimized to analysis area |
| Charge Neutralization | Differentially pumped low energy electron source |
| Ion Source | Scannable small spot ion source (200 eV – 5 keV) Gas cluster ion source |
| Pumping System | Turbomolecular pumps Oil-free backing pumps Chemical resistant pumping system on request |
| Pressure Range | Defined by analyzer aperture (up to 100 mbar with an aperture of 300 μm; other aperture sizes on request) |
| Gas Dosing System | Two separated gas dosers at analysis position Mass flow controllers |
| Cameras | 3 digital microscopes for sample navigation and documentation |
| Automation and Software | Fully automated vacuum and gas dosing system Advanced software package |
Sample Environment(standard, others on request)
| Sample Stage | High precision 3-axis stage |
| Sample Size | Up to Ø 60 mm and 40 mm in height |
| Gas Dosing | Connections for process and purge gases |
| Cleaning | Downstream RF plasma cleaner |
| Camera | Digital microscope for sample observation and documentation |
| Spare Ports | 2×DN40CF (2,75”) e.g. for electric or liquid feedthroughs |
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