Fully automated measurement environment
EnviroESCA Electron Spectroscopy for Chemical Analysis under Environmental Conditions

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EnviroESCA Electron Spectroscopy for Chemical Analysis under Environmental Conditions EnviroESCA Electron Spectroscopy for Chemical Analysis under Environmental Conditions


This novel and smart analysis tool overcomes the barriers of standard XPS systems by enabling analyses at pressures far above UHV. EnviroESCA is designed for high-throughput analysis and opens up new applications in the fields of medical technology, biotechnology and the life sciences. It offers the shortest loading-to-measurement time on samples of all types including liquids, tissue, plastics and foils, powders, soil, zeolites, rocks, minerals and ceramics.


Electron Spectrometer Hemispherical electron analyzer with 150 mm mean radius
Differentially pumped lens system
Delayline detector with up to 400 channels
X-ray Source Al Kα micro-focused monochromator
Rowland circle diameter of 600 mm
Spot sizes of 200 μm – 1 mm optimized to analysis area
Charge Neutralization Differentially pumped low energy electron source
Ion Source Scannable small spot ion source (200 eV – 5 keV)
Gas cluster ion source
Pumping System Turbomolecular pumps
Oil-free backing pumps
Chemical resistant pumping system on request
Pressure Range Defined by analyzer aperture (up to 100 mbar with an aperture of 300 μm; other aperture sizes on request)
Gas Dosing System Two separated gas dosers at analysis position
Mass flow controllers
Cameras 3 digital microscopes for sample navigation and documentation
Automation and Software Fully automated vacuum and gas dosing system
Advanced software package

Sample Environment(standard, others on request)

Sample Stage High precision 3-axis stage
Sample Size Up to Ø 60 mm and 40 mm in height
Gas Dosing Connections for process and purge gases
Cleaning Downstream RF plasma cleaner
Camera Digital microscope for sample observation and documentation
Spare Ports 2×DN40CF (2,75”) e.g. for electric or liquid feedthroughs

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