Femtosecond laser micro-nanomachining system is possible to offer micro-nanomachining for any material. In recent years, it is expected taht femtosecond laser processing is a new biomolecules knife which do not damage surrounding cells and tissue of biological samples(sensitive to thermal effects) as an application of photon craft technology.
Specification
Femtosecond laser Micro-nanomachining system
| Products | Solid state laser | Fiber laser | ||
|---|---|---|---|---|
| Laser | Wavelength*1 | 800 nm/1028 nm | 1064 nm | |
| Pulse energy*2 | <3.5 mJ@1 kHz/800 nm <1.0 mJ@1 kHz/1028 nm |
<2 μJ@1MHz | ||
| Repetition rate*3 | single shot～10 kHz@800 nm single shot～1 MHz@1028 nm |
signle shot～1 MHz | ||
| Pulse duration*4 | <100 fs@800 nm <300 fs@1028 nm |
<300 fs | ||
| Spatial mode | TEM00 M2<1.3 | |||
| Optical unit*5 | Auto-focus mechanism with confocal optical system：Scan range±2mm、resolution<1μm Control of pulse energy and polarization |
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| Irradiation unit |
Positioning stage*6 Stepping motor stage |
XY axis：±50 mm、resolution 2 μm、Maximum scan speed 16 mm/s | ||
| Z axis：0～20 mm、resolution 1 μm、Maximum scan speed 5 mm/s | ||||
| Sample stage*7 | Vacuum table(Stainless steel) | |||
| Microscope based body, Irradiation optical system, Observation optical system | ||||
| Control unit | Controller, Power supply, Software | |||
| Optical table with air spring*8 | Optical table (Steel honeycomb structure)： 1500(W)×800(H)×1800(L) mm |
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| Physical characteristics*9 | Main unit(including laser, Optical unit, Irradiation unit and otpical table)：1500(W)×1800(H)×1800(L) mm | |||
| Control unit：900(W)×1000(H)×570(L) mm (19 inch rack mount) | ||||
| Operating conditions | Main unit(including Optical unit, Irradiation unit and otpical table)：AC100V/20A | |||
| Laser：AC100V/60A@800 nm、 AC100V/20A@1028 nm、 AC100V/3A@1064 nm |
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*1 Harmonic module option
Wavelength800 nm→Wavelength400nm/266nm
Wavelength1028nm→Wavelength515nm/343nm/257nm
Wavelength1064nm→Wavelength532nm/355nm/266nm
*2 High energy option
Up to 1.0mJ@1kHz
*3 High repetition rate option
Up to 10kHz@800nm
Up to 1MHz@1028nm
*4 Extend pulse duration option
Up to 10ps *5 Beam shaping and Polarization conversion option Top-hat beam, Multi-beam, etc
Circular, Radial and Azimuth polarization
*6 It is possible to select other stage.(linear motor, piezo motor stage, Galvo mirror, etc)
*7 It is possible to select porous ceramic vacuum table.
*8 It is possible to select rubber spring type and stone surface type.
*9 It will change physical characteristics depend on configuration
※If you have any question, it is possible to customize system.
Please do not hesitate to contact us.
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