High efficiency high harmonics source 
XUUS-high harmonic generation source for EUV and soft X-ray

Overview

XUUS is a coherent EUV/So X-ray light source based on high-harmonic generaon (HHG). It is a fully engineered and integrated commercial source based on a single rugged opto-mechanical plaorm. It employs a patented (US 6,151,155) hollow waveguide for the high-harmonic upconversion process.

Feature

• Wavelength ranges:
  - EUV 10-47 nm (26-124 eV)
  - Soft X-rays 4-10 nm (124-300 eV)
  - Soft X-rays 1-10 nm (124-1000 eV)
• Highest efficiency HHG: average EUV power of up to 10 %W
• Fully engineered for outstanding long-term power & poinng stability (<5% & <10 %Rad over 12 hours)
• Fully coherent near-Gaussian “laser-like” output beam
• Ultra-low gas load into beamline for maximized opcal transmission and UHV compability
• Minimized gas and vacuum pump usage (500 hrs from standard 100 L bo$le typical)
• Graphical, intuive software control

Applications

• Photoemission: tr-ARPES & attosecond materials science
• Metrology for nanoelectrics and in support of EUV lithography
• High-resolution and time-resolved lensless nanoimaging
• Ultrafast magnetic materials & spintronics studies
• High spatial and temporal resolution pump-probe studies of magnetic, materials, molecular, and nanosystems dynamics
• Molecular dynamics and attoscienc