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3D Raman Microscopy System, Micro-Nano Scale Micro spectroscopy Nanofinder®30

Nanofinder®30

Nanofinder®30 is a Raman Confocal spectroscopy device with high sensitivity and high spatial resolution. It can do 3D Raman imaging with lateral spatial resolution of 200 nm and axial resolution of 500 nm.

Moreover, combined with Scanning Probe Microscope (SPM), it can perform simultaneously measured Raman and Topography Imaging. With Tip Enhanced Raman Scattering (TERS) technology it can obtain lateral resolution of 50 nm or less.

With UV excitation, it is ideal for Si device stress distribution measurement.

Nanofinder®30 - это Рамановский Конфокальный Микроскоп с предельно высокими чувствительностью и пространственным и спектральным разрешениями. Прибор позволяет получать трёхмерные рамановские изображения с возможностью различать детали объекта размером 200 нм.

Прибор может быть интегрирован со сканирующим зондовым микроскопом для одновременной регистрации спектрального Рамановского изображения и, например, картины топографии поверхности объекта.

С использованием эффекта локального гигантского комбинационного рассеяния возможно получение рамановских изображений с разрешением в несколько раз превышающим диффракционный предел (50 нм и меньше).

С ультрафиолетовым лазером на длине волны 364 нм Nanofinder®30 идеально подходит для анализа механических напряжений и деформаций в кремниевых полупроводниковых микро- и наноструктурах..
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3D Confocal Raman system features:

Up-right microscope configuration Inverted microscope configuration

High spatial resolution

Nanofinder®30 is a Confocal Raman system, designed to obtain maximum spatial resolution. When using a 488 nm laser and an air objective lens lateral resolution of 250 nm is possible. With UV excitation of 364 nm and an immersion lens lateral resolution can be as low as 130 nm.

Excitation: 488 nm, objective lens: 100xN.A.0.9.
Sample: sharp Si/SiO2 border.
 

High sensitivity, high speed 3D image measurement

With Nanofinder®30 the fourth order of Si Raman signal can be detected within one minute exposure (see figure below).
2D . 3D images can be acquired rapidly.
In addition, nondestructive low laser excitation power (sub μW ~ mW) can be applied.

Sample: silicon wafer.
Excitation laser: 488 nm, power on the sample 5 mW, accumulation 1 min.



High sensitivity and 3D high-speed Raman imaging
3D Raman image of polyethylene beads.

Simultaneous optical and spectral image

The Confocal Laser Microscope option provides the acquisition of 2 images after a single scan: a confocal laser microscope image (using laser light, reflected from sample) and a confocal spectral image (using Raman or luminescence spectra, scattered by the sample).



Sample: ZnTe monocrystal.

Raman Spectroscopy nearby to excitation laser line

Raman signals below 100 cm-1 are easily detectable.

3 excitation laser wavelengths

Up to 3 different excitation lasers can be installed in one system. The excitation laser wavelength is changed automatically with a single computer click.

Flexible system design

A zoom beam expander allows the excitation laser beams to have optimal diameters for any microscope objective lens.

Smooth motorized control of the confocal pinhole size allows optimization for highest spatial resolution or highest sensitivity.

Waveplates and Glan prisms are used for polarization measurements.

System layout

High throughput 52cm imaging spectrometer

Motorized turret with 4 gratings. Dielectric coating for spectrometer mirrors for high throughput. 2 exit ports for CCD and PMT (APD, Streak-camera).

New Echelle grating option. This option allows extremely high spectral resolution of 0.5 cm-1 (per 1.5 CCD pixel).

Automating

Different system configurations (for different lasers or microscopic objective lenses, etc.) are saved in computer memory and changed by a single keyboard click. Motorized control for laser power, beam diameter, polarization orientation, pinhole size, grating and central wavelength selection, detector, shutters etc.

AFM option. TERS option

With a specially designed AFM head optical access to the probe apex with high NA microscopic objective lenses is possible (0.7 from the top, 0.42 from side and 1.4 from bottom). Read more....

Advanced software

The Nanofinder®30 software has an intuitive user-friendly interface and includes universal tools for advanced spectroscopy measurements with multiple calibration and curve fitting functions, Fluorescence Life Time Imaging functionality, 1-,2-,3-D mapping facilities with full spectral or fluorescence decay information saving. The mapping program can control an AFM to obtain Raman and topography images simultaneously. Multiple filters, functions and database options are available for real-time and post data and image processing and analysis.

Software structure
Operation system: Windows XP
Hardware control, spectral and mapping data acquisition
Real time display and data processing
Imaging of variety of spectral functions, image analysis
Software options
Spectral line fitting Data Base
Deconvolution Custom-designed

Spectral line fitting software

Spectral features can be fitted with up to 3 peaks of Lorentzian and Gaussian lineshape. All these 3 peaks can be used for construction of Raman Intensity, Shift, and half bandwidth (FWHM) images.

Parameters of fitting
Curve 1 Curve 2 Curve 3
Peak intensity(Counts): 86.4 452.1 178.6
Peak position(cm-1): 510.0033 516.6525 520.7016
Peak FWHM(cm-1): 0.4598 3.8315 2.9748



Deconvolution software function for spatially improved imaging

In the example shown below the application of a deconvolution function has improved the imaging of fine details from 295 to 195 nm (Raman intensity image) and from 160 nm to 120 nm (Raman line FWHM image). In general, the deconvolution function application leads to about 1.5 times of spatial resolution improvement.

1D deconvolution


2D deconvolution

AFM image
Sample: Si device

Raman image
Original data

Intensity (a.u.)
 Raman shift (cm-1)
After deconvolution

Improvement and sharpening of 2D-Raman images with deconvolution applied.
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3D Raman confocal micro-spectroscopy system

General performance:

Sensitivity: detects 4th order of Si Raman peak within 1 min exposure. (With 488 nm/5 mW)

Spectral range: 50 cm-1 ~ 5000 cm-1 (varies with excitation laser wavelength)

Spectral resolution:up to 0.5 cm-1/per 1.5 CCD pixel (with Echelle grating option)

PC control: Full automation

Microscope

Upright or Inverted type

CCD for sample monitoring

Optical unit (selection)

VIS-NIR or UV-VIS-NIR type

Polarization control option

Imaging spectrometer

Focal length 52 cm
Changeable gratings: 4 pc. Echelle grating option.
Slit width: 0 ~ 1.5 mm(motorized)
Exit ports: 2 (for CCD and PMT or APD)
Reciprocal dispersion: 1.529 nm/mm (at 600 nm with grating 1200 lines/mm)

Piezo-stage scanner

X×Y : 100 μm (200μm optional)
Z : 30 μm (100μm optional)
Positional reproducibility: <30 nm (closed loop)
Max load: 2 kg

Galvanic mirror scanner (option)

X×Y : 100 μm(with 100X objective lens)
250 μm(with 40X objective lens)

Step motor scanner/positioner option

Detector (2 detectors can be installed simultaneously)

Thermoelectrically cooled CCD: 1024×128 pixels (pixel size: 26μm)
Cooling down to -100oC
 
UV, VIS, NIR type selection
APD (Avalanche Photo Diode) Photon Counting mode
Fiber delivery system
Dark Counts/sec < 100
PMT (photomultiplier): Photon Counting mode
Direct coupling or fiber delivery (for cooling version)
Dark Counts/sec < 100 (UV and VIS-NIR)
Optional: EMCCD, InGaAs linear diode array, Streak-camera, MCP-PMT.

Excitation laser (3 lasers can be installed simultaneously)

Spatial mode TEM00

Laser wavelengths.

Main: 363.8 nm, 488 nm, 532 nm, 632.8 nm, 785 nm
Optional: 325, 405, 473, 514 nm.

Software

Nanofinder 30 standard software: mapping control, data acquisition and saving.

Raman or fluorescence spectra display.

Various spectrometer calibration functions

2D.3D imaging, arbitrary cross-section

Full system automatical control: Shutters, Laser wavelength, power, beam diameter adjustment, polarization orientation in excitation/detection channels, confocal pinhole size, grating and central wavelength selection, exit port of spectrometer, adjustment of signal on the confocal pinhole, etc.

Spectra and image processing.

Spectral line fitting option.

Deconvolution option.

Options

- LCM (Laser Confocal Microscope)
- AFM (Atomic Force Microscope)
- FLIM (Fluorescence Lifetime Imaging Microscope)
- Cryostat, Temperature controlled stage
- Top laser input for inverted microscope
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Living Cell, Single molecule detection, Medical Science(DNA, Proteins, Tissues etc)
Semiconductor, Electronic Components (Stress Analysis,Chemical Composition Analysis, Physical Structure Analysis)
Foreign Materials Analysis
Thin Films, Passivating Coatings(DLC, Paints, Adhesives)/Interface Layer
Crystals, Liquid Crystal Structure, Nanocrystals, Carbon Nanotubes
Refractive Index Change of Optical wave Guide, Glass, Photonic Crystals

Bio Cell

  1. Y.-S. Huang, T. Karashima, M. Yamamoto, and H. Hamaguchi, "Molecular-level pursuit of yeast mitosis by time- and space-resolved Raman spectroscopy," J. Raman Spectrosc. 34,1-3 (2003).
  2. Y.-S. Huang, T. Karashima, M. Yamamoto, T. Ogura, and H. Hamaguchi, "Raman spectroscopic signature of life in a living yeast cell," J. Raman Spectrosc. 35,525-526 (2004).
  3. Y.-S. Huang, T. Karashima, M. Yamamoto, and H. Hamaguchi, "Molecular-level investigation of the structure, transformation, and bioactivity of single living fission yeast cells by time- and space-resolved Raman Spectroscopy," Biochemistry 44,10009-10019 (2005).
  4. Yutaka Shibata, Yoshitaka Saga, Hitoshi Tamiaki, and Shigeru Itoh. Low-Temperature Fluorescence from Single Chlorosomes, Photosynthetic Antenna Complexes of Green Filamentous and Sulfur Bacteria. Biophys J. 2006 November 15; 91(10): 3787-3796.
  5. Mi Suk Jeong, Jeong soon Park, Seong Hwan Song, and Se Bok Jang. Characterization of Antibacterial Nanoparticles from the Scallop, Ptinopecten yessoensis. Biosci. Biotechnol. Biochem., 71(9), 2242-2247, 2007.

Carbon Nanotubes

  1. N.Nagasawa, H.Sugiyama, N.Naka, I.Kudryashov, M.Watanabe, T.Hayashi, I.Bozovic, N.Bozovic, G.Li, Z.Li, Z.K.Tang. Visible emission of single-wall carbon nanotubes formed in micro-channels of zeolite crystals. Journal of Luminescence 97 (2002), pp.161-167.
  2. Nobukata Nagasawa, Hirokazu Sugiyama, Nobuko Naka, Igor Kudryashov, Zhao-Ming Li and Zi-Kang Tang. Optical Nano-Tomography on Photosensitive Single-Wall Carbon Nanotube Arrays in Zeolite Crystals. Japanese Journal of Applied Physics, Vol.43, No.2, 2004, pp.868-871.
  3. Jian-Ting Ye, Nobuko Naka, Yasushi Morihira, Zi-Kang Tang, Wei-Kun Ge, Ping Sheng, Igor Kudryashov and Nobukata Nagasawa. Optical Micro-Characterization of Single-Walled Carbon Nanotubes Extracted from AFI Crystals by Visible Emission and Raman Scattering. Japanese Journal of Applied Physics, Vol.43, No.10, 2004, pp.7354-7355.
  4. Chungsying Lu, Huantsung Chiu. Adsorption of zinc(II) fromwater with purified carbon nanotubes. Chemical Engineering Science 61 (2006) 1138 - 1145.
  5. Nobuhito Inamia, Mohd Ambri Mohameda, Eiji Shikoha, Akihiko Fujiwara. Synthesis-condition dependence of carbon nanotube growth by alcohol catalytic chemical vapor deposition method. Science and Technology of Advanced Materials 8 (2007) 292-295.
  6. M. A. Mohamed, N. Inami, E. Shikoh, Y. Yamamoto, H. Hori, and A. Fujiwara: "Spintronics device using direct synthesis of single-walled carbon nanotubes from ferromagnetic electrodes", Sci. Technol. Adv. Mater. 9 (2008) 025019-1 - 025019-5.
  7. N. Inami, M.A. Ambri, E. Shikoh, and A. Fujiwara. "Device characteristics of carbon nanotube transistor fabricated by direct growth method", Appl. Phys. Lett. 92 (2008), 243115-1 - 243115-3. Appears also in Virtual Journal of Nanoscale Science & Technology 17 (Issue 26) (2008).
  8. Mohd Ambri Mohamed, Nobuhito Inami, Eiji Shikoh, Yoshiyuki Yamamoto, Hidenobu Hori and Akihiko Fujiwara. Fabrication of spintronics device by direct synthesis of single-walled carbon nanotubes from ferromagnetic electrodes. Sci. Technol. Adv. Mater. 9 (2008) 025019 (5pp).
  9. LEE Shih-Fong, CHANG Yung-Ping, LEE Li-Ying. Enhancement of Field Emission Characteristics for Multi-Walled Carbon Nanotubes Treated with a Mixed Solution of Chromic Trioxide and Nitric Acid Acta Phys. -Chim. Sin., 2008, 24(8):1411-1416.

Combined AFM Raman

  1. Bulgarevich, Dmitry S.; Futamata, Masayuki. Apertureless Tip-Enhanced Raman Microscopy with Confocal Epi-Illumination/Collection Optics. Applied Spectroscopy, 2004, Volume 58, Issue 7, pp. 757-761(5).
  2. Takashi Kodama, Hiroyuki Ohtani, Hideo Arakawa, Atsushi Ikai. Atomic force microscope equipped with confocal laser scanning microscope for the spectroscopic measurement of the contact area in liquid. Chemical Physics Letters 385 (2004), 507-511.
  3. S. Nishio, C. Kanezawa, H. Fukumura. Formation and characterization of polyperinaphthalenic organic semiconductor nanoparticles by laser ablation of mixture targets of a perylene derivativewith cobalt powder at 355 nm. Appl. Phys. A 79, 1449-1451 (2004).
  4. Takashi Kodama, Hiroyuki Ohtania, Hideo Arakawa, Atsushi Ikai. Observation of the destruction of biomolecules under compression force. Ultramicroscopy 105 (2005) 189-195.
  5. E. Klimov, W. Li, X. Yang, G. G. Hoffmann and J. Loos. Scanning Near-Field and Confocal Raman Microscopic Investigation of P3HT-PCBM Systems for Solar Cell Applications. Macromolecules 2006, 39, 4493-4496.
  6. Takashi Kodama, Hideo Arakawa,tsushi Ikai and Hiroyuki Ohtani. Direct Detection of the Solvent Molecules between Solid Surfaces with Simultaneous Adhesion Force Measurement. J. Phys. Chem. C 2007, 111, 7098-7104.

Crystal Defects

  1. H.W. Hubble, I. Kudryashov, V.L. Solozhenko, P.V. Zinin, S.K. Sharma and L.C. Ming. Raman studies of cubic BC2N, a new superhard phase. J. Raman Spectrosc.2004; 35: 822-825.
  2. Z. Q. Chen, A. Kawasuso, Y. Xu, H. Naramoto, X. L. Yuan, T. Sekiguchi, R. Suzuki, T. Ohdaira. Production and recovery of defects in phosphorus-implanted ZnO. JOURNAL OF APPLIED PHYSICS 97, 013528 (2005).
  3. Z. Q. Chen, A. Kawasuso, Y. Xu, H. Naramoto, X. L. Yuan, T. Sekiguchi, R. Suzuki, T. Ohdaira. Microvoid formation in hydrogen-implanted ZnO probed by a slow positron beam. PHYSICAL REVIEW B 71, 115213, (2005).
  4. P.V.Zinin, I.Kudryashov, N.Konishi, L.C.Ming, V.L.Solozhenko, S.K.Sharma. Identification of the diamond-like BC phases by confocal Raman spectroscopy. Spectrochim Acta A, Mol. Biomol. Spectrosc. 2005 Aug ;61:2386-9 16029861
  5. P.V.Zinin and L.C.Ming, I.Kudryashov and N.Konishi, M.H.Manghnani and S.K.Sharma. Pressure- and temperature-induced phase transition in the B-C system. Journal of Applied Physics, 100, 013516 (2006).
  6. P. V. Zinin, L. C. Ming, I. Kudryashov, N. Konishi, S. K. Sharma. "Raman spectroscopy of the BC3 phase obtained under high pressure and high temperature." Journal of Raman Spectroscopy, 2007, Volume 38, Issue 10, p.1362-1367.
  7. Ching-Yuan Cheng, Kuan-Jiuh Lin , Muppa R. Prasad, Shu-Juan Fu, Sheng-Yueh Chang, Shin-Guang Shyu, Hwo-Shuen Sheu, Chia-Hao Chen, Cheng-Hao Chuang, Minn-Tsong Lin. Synthesis of a reusable oxotungsten-containing SBA-15 mesoporous catalyst for the organic solvent-free conversion of cyclohexene to adipic acid. Catalysis Communications 8 (2007) 1060-1064.
  8. Jian-Hua YIN and Hitoshi WATARAI. Resonance Raman Spectroscopic Study on Chiral Aggregation of Bilirubin-Bovine Serum Albumin Complex Formed at Liquid/Liquid Interface. ANALYTICAL SCIENCES JULY 2007, VOL. 23, pp.841-846.

Films

  1. S. Gwo, C.-L. Wu, C.-H. Shen, W.-H. Chang, T. M. Hsu, J.-S. Wang, J.-T. Hsu. Heteroepitaxial growth of wurtzite InN films on Si.111. exhibiting strong near-infrared photoluminescence at room temperature. APPLIED PHYSICS LETTERS, 2004, VOLUME 84, NUMBER 19, pp.3765-3767.
  2. Morikawa S., Ikeda C., Ogawa K., Kobuke Y. Two-Dimensional Porphyrin Array Assembled by Self-Coordination. Letters in Organic Chemistry, Volume 1, Number 1, January 2004 , pp. 6-11(6)
  3. K.Itoh, T.Nishizawa, J.Yamagata, M.Fujii, N.Osaka, and I.Kudryashov. Raman Microspectroscopic Study on Polymerization and Degradation Processes of a Diacetylene Derivative at Surface Enhanced Raman Scattering Active Substrates.1. Reaction Kinetics. J.Phys.Chem.B, 2005, 109, 264-270.
  4. K.Itoh, I.Kudryashov, J.Yamagata, T.Nishizawa, M.Fujii, and N.Osaka. Raman Microspectroscopic Study on Polymerization and Degradation Processes of a Diacetylene Derivative at Surface Enhanced Raman Scattering Active Substrates.2. Confocal Raman Microscopic Observation of Polydiacetylene Adsorbed on Active Sites. J.Phys.Chem.B, 2005, 109, 271-276.
  5. Z.Q. Chen, S. Yamamoto, A. Kawasuso, Y. Xu, T. Sekiguchi .Characterization of homoepitaxial and heteroepitaxial ZnO films grown by pulsed laser deposition. Applied Surface Science 244 (2005) 377-380.
  6. Hyeong-Gon Kang, Seong Kyu Kim, Haeseong Lee. The analysis of superconducting thin films modified by AFM lithography with a spectroscopic imaging technique. Surface Science 600 (2006) 3673-3676.

LED

  1. Koichi OKAMOTO, Jungkwon CHOI, Yoichi KAWAKAMI, Masahide TERAZIMA, Takashi MUKAI and Shigeo FUJITA. Submicron-Scale Photoluminescence of InGaN/GaN Probed by Confocal Scanning Laser Microscopy. Japanese Journal of Applied Physics, Vol. 43, No. 2, 2004, pp. 839-840.
  2. Koichi Okamoto, Akio Kaneta, Yoichi Kawakami, Shigeo Fujita, Jungkwon Choi, Masahide Terazima, Takashi Mukai. Confocal microphotoluminescence of InGaN-based light-emitting diodes. JOURNAL OF APPLIED PHYSICS 98, 064503, 2005.

Micromachining Combined

  1. K. Miura, Jianrong Qiu, S. Fujiwara, S. Sakaguchi, K. Hirao. Three-dimensional optical memory with rewriteable and ultrahigh density using the valence-state change of samarium ions. Appl. Phys. Lett., Vol. 80, No. 13, 2002, pp.2263-2265.
  2. Masaki TAKESADA, Egidijus VANAGAS, Dmitri TUZHILIN, Igor KUDRYASHOV, Shoji SURUGA, Hidetoshi MURAKAMI, Nobuhiko SARUKURA, Kazunari MATSUDA, Shuji MONONOBE, Toshiharu SAIKI, Mamoru YOSHIMOTO and Shin-ya KOSHIHARA. Micro-Character Printing on a Diamond Plate by Femtosecond Infrared Optical Pulses. Jpn. J. Appl. Phys. Vol. 42 (2003) pp. 4613-4616.
  3. E. Vanagas, I. Kudryashov, S. Juodkazis, S. Matsuo, H. Misawa, R. Tomasiunas. Micrometer and Sub Micrometer-Size Structures Fabricated by Direct Writing Using Femtosecond Light Pulses.ISSN 1392-1320 MATERIALS SCIENCE (MEDZIAGOTYRA). Vol. 9, No. 4. 2003.

Polymers

  1. Mariano Campoy-Quiles, Yuya Ishii, Heisuke Sakai, and Hideyuki Murata. Highly polarized luminescence from aligned conjugated polymer electrospun nanofibers. APPLIED PHYSICS LETTERS 92, 213305 (3 pages), 2008.

Stress Strain

  1. Sawano, K. Koh, S. Shiraki, Y. Usami, N. Nakagawa, K. In-plane strain fluctuation in strained-Si/SiGe heterostructures. APPLIED PHYSICS LETTERS, 2003, VOL 83; NUMB 21, pages 4339-4341.
  2. Kutsukake, K. Usami, N. Ujihara, T. Fujiwara, K. Sazaki, G. Nakajima, K. On the origin of strain fluctuation in strained-Si grown on SiGe-on-insulator and SiGe virtual substrates. APPLIED PHYSICS LETTERS, 2004, VOL 85; NUMB 8, pages 1335-1337.
  3. Poborchii, V. Tada, T. Kanayama, T. High-spatial-resolution Raman microscopy of stress in shallow-trench-isolated Si structures (3 pages). APPLIED PHYSICS LETTERS, 2006, VOL 89; NUMB 23, pages 233505.
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Catalogs
Nanofinder®30 2008 --- 817 kb
Nanofinder®30 2008 (Russian) --- 300 kb
Nanofinder®30 2008 (Chinese) --- 257 kb
Nanofinder®30 - AIST-NT™ Confocal Raman / AFM combined system 2008 --- 3.2 mb
Nanofinder®30 Strained Si Measurement 2006 --- 457 kb
Nanofinder®30 2004 --- 1000 kb
Descriptions
Advanced 3-D confocal microscope for Raman imaging spectroscopy 2004 --- 108 kb
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