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High-Resolution Low Profile 3 Axis Piezo Stage Low Profile 3 Axis Stage
 

Low Profile 3 Axis Piezo Stage/BIO3/LT3

PZ01 Quotation・Inquiry
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Overview

PIEZOCONCEPT’s 3-axis ultra-low profile nanopositioners designed to be integrated in any kind of inverted microscopes. Microscope slides can be accommodated inside BIO3’s rectangular aperture. These piezo stages can be proposed with a coarse positioning Micro stage. As standard, these are made in Aluminum but we can propose the 100µm version stages also in Invar, which leads to higher thermal stability.

Features

- Low profile
- Combination with every microscope
- Hybrid stage
- Rich accessary
- Inver stage for 100 um version
- BIO3:Wide aperture
- Less than 30pm noise floor

Applications

- Super Resolution microscopy
- Nanolithography
- Particle tracking
- Confocal microscopy
- Atomic Force Microscopy

仕様

BIO3/LT3.100 BIO3/LT3.200 BIO3/LT3.300
Range of motion XYZ (μm) 100 200 300
Resolution XYZ (nm) 0.1 0.2 0.3
Typical noise ?oor XYZ (nm) 0.01 0.02 0.03
Full range repeatability XYZ (nm) 0.2 0.4 0.6
Linearization (typical) 0.02% 0.02% 0.02%
Resonant frequency X/Y/Z (Hz) 500/400/400 400/350/300 300/250/250
Stiffness X/Y/Z (N/μm) 0.6/0.5/0.5 0.5/0.4/0.4 0.4/0.3/0.3
Maximum load (kg) - horizontal use 1 1 1
Maximum load (kg) - vertical use 0.5 0.5 0.5
Sensor Silicon HR sensor Silicon HR sensor Silicon HR sensor
BIO3 Size W x L x H (mm) 152.5 x 213 x 20.45 152.5 x 213 x 20.45 152.5 x 213 x 20.45
LT3 Size W x L x H (mm) 152.5 x 193 x 20.70 152.5 x 193 x 20.70 152.5 x 193 x 20.70
Material Al or Invar Al Al
Cable length (m) 2 2 2
Recommended Controller Standard Standard Standard
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Head Office 81-3-3686-4711
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