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3D Laser Raman Microspectroscopy System Nanofinder 30

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Tokyo Instruments Inc.
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3D Laser Raman Microspectroscopy System Nanofinder 30 3D Laser Raman Microspectroscopy System Nanofinder 30


Nanofinder®30 is a Raman Confocal spectroscopy device with high sensitivity and high spatial resolution. It can do 3D Raman imaging with lateral spatial resolution of 200 nm and axial resolution of 500 nm. Moreover, combined with Scanning Probe Microscope (SPM), it can perform simultaneously measured Raman and Topography Imaging. With Tip Enhanced Raman Scattering (TERS) technology it can obtain lateral resolution of 50 nm or less. With UV excitation, it is ideal for Si device stress distribution measurement.

“Large Area Scan option” – Fast mapping of big samples

・Raman mapping with step motor stage of millimeter, centimeter or even larger scanning area.
・Fast scan by synchronized constant speed sample movement and data collection.
・Easy switching between point scan and fast scan.
・Combinable with “Line Scan” option.
※Stepping motor stage is required for this scan option.

Application example 1: Large test grid

Size: 27.5 mm X 3.85 mm
Number of spectra: 218,827 (2,751x77)
Mapping time: ~25 min  (~7.2 ms/point)

Application example 2: Pharmaceutical tablet

Raman intensity Image of
Aspirin (blue) and Paracetamol (red)

Aspirin and Paracetamol spectra,
40xNA0.6, exposure 1 min

Size: 7.75 mm X 7.75 mm
Number of spectra: 24,025 (155x155)
Mapping time: 50 min (~125 ms/point)

System configuration Upright microscope
Raman optical unit
Imaging spectrometer
Cooled CCD detector
Piezo stage (XYZ)
Excitation laser
Controller/software/23 inch LCD
Spatial resolution XY <300 nm, Z <900 nm
Sensitivity High sensitivity measurement of 4th-order Si Raman peak within 1 min/point(488 nm/5 mW)

Each unit specification

Raman optical unit One excitation laser is available(Unit exchange depending on lasers)
FC connector coupling between spectrometer and laser

Imaging spectrometer MS3504i

Coupling fiber SUS sleeve Φ10×60 mm
Focal length 35 cm, F/3.8
Reciprocal linear dispersion 2.37 nm/mm@1200 G/mm
Wavelength resolution 0.06 nm@550 nm, 1200 G/mm
Wavenumber resolution 2 cm-1@550 nm, 1200 G/mm
Maximum gratings 4

Cooled CCD detector (DU401A-BV, DU401A-BRDD)

Elements 1024×127
Element size 26×26 μm2
Image area 26.6×3.3 mm
Maximum cooling temperature -100 ℃(water), -80 ℃(air)

Piezo stage (Closed loop)

X-Y-Z stroke 100 μm
Resolution 5 nm
Repetition accuracy ±5 nm
Built-in sensor capacitive sensor

Excitation laser

Common specification fiber output, FC connector coupling fiber length 2m
continuous variable power
DPSS laser Wavelength: 532 nm
Power : 25 mW (@fiber exit)
LD laser Wavelength:785 nm
Power : 40 mW(@fiber exit)
Others 473 nm, 488 nm, 514 nm, 633 nm, 671 nm etc.
Pulse laser(for FLIM) available
Control/analysis software :
Mapping control
Data acquisition/save
Display of Raman/fluorescence spectrum
Spectrometer calibration
2D/3D imaging, slice at arbitrary cross-section
Spectrum/image analysis
Spectral peak fitting
Installation space Microscope and Raman optical unit 600(W)×700(H)×850(D) mm
(Including spectrometer/CCD, piezo stage, controller)
Power consumption 1200 W, 100 V
Options cryostat, heating stage, electrochemical cell, TCSPC board, spectrum database etc.

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