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Measure polarized light reflected from the surface of a substrate to determine the thickness and refractive index of the material as a function of wavelength
Spectral Ellipsometer System, SpecEL series

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  • Specification
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The SpecEl-2000-VIS Ellipsometer measures polarized light reflected from the surface of a substrate to determine the thickness and refractive index of the material as a function of wavelength. The SpecEl is controlled via a PC. Measure refractive index, absorbance and thickness with the touch of a button. The SpecEl houses an integrated light source, a spectrometer and two polarizers fixed to 70°. It also includes a PC with a 32-bit Windows operating system. The SpecEl can detect a single layer as thin as 0.1 nm and up to 5μm thick. In addition, it can provide refractive indices to 0.005°. In SpecEl Software, you can configure and save experiment method files for one-step analysis. after creating a "recipe," you can select the recipe to execute the experiment.

Specification

Series UV-VIS-NIR VIS-NIR
Wavelength range 300-1000 nm 400-1000 nm
Optical resolution 1 nm
Accuracy 0.1 nm
Angle of incidence 70°
Film thickness 1 nm - 10 μm
Beam diameter 400 x 1200 μm
Measurement speed 7 - 13 seconds
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